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Supporting Wafers up to 300 mm (12")
Model: UVC-512
Dimensions: 650(W)×800(D)×980
(H)
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There
are two high-pressure Hg lamp models: one
supporting 200 mm (8") wafers and the
other supporting 300 mm (12") wafers.
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These
systems provide uniform irradiation to the
entire area of a rotating work piece. |
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These
systems are equipped with a proprietary,
high-efficiency, low flow rate N2 purge
function. This allows a significantly lower
level of N2 usage compared with existing
systems, while ensuring the proper displacement.
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Not
only do these characteristics contribute
to lower running costs by reducing the consumption
of power and gas, they also improve the
efficiency of the manufacturing process
as a whole by reducing the system cost and
minimizing usage of precious clean room
floor space. |
